In the field of high-end manufacturing and cutting-edge scientific research, the ultra-precision motion module of the air float has become a key equipment for fine operation and measurement with its excellent precision performance. The granite precision base, as the support core, has strict requirements for the working environment, and the suitable environmental conditions are the basis to ensure its stable performance and the best effect.
First, temperature control: precision "stabilizer"
Although granite is known for its stability, it is not completely immune to temperature changes. Although its coefficient of thermal expansion is low, generally 5-7 ×10⁻⁶/℃, in ultra-precision motion control scenarios, subtle temperature fluctuations may still cause dimensional changes and affect module accuracy. In the semiconductor chip manufacturing workshop, the lithography process requires a danami-level positioning accuracy, and the ambient temperature fluctuates by 1 ° C, and the granite base with a side length of 1 meter may produce a linear expansion or contraction of 5-7 microns. This small change is transmitted by the ultra-precision motion module of the air float, which is enough to make the chip lithography pattern deviation and greatly reduce the yield. Therefore, equipped with granite precision base of the air floating ultra-precision motion module, the ideal working environment temperature should be controlled at 20 ° C ±1 ° C, with the help of high-precision constant temperature equipment, such as constant temperature and humidity air conditioning system, continuous monitoring and adjustment of the ambient temperature, to ensure that the temperature fluctuations in a very small range, maintain the base size stability, to ensure that the module high-precision operation.
Second, humidity management: the key to moisture-proof protection "stone"
Humidity is another important factor affecting the performance of precision granite base. In a high humidity environment, granite is easy to absorb water vapor, which may lead to condensation on the surface, which not only affects the connection stability of the granite and the ultra-precision motion module of the air float, but also may cause surface erosion and reduce gloss and accuracy in the long run. In the optical lens grinding workshop, if the humidity is higher than 60%RH for a long time, the water vapor adsorbed on the surface of the granite base will interfere with the movement of the gas float slider, so that the lens grinding accuracy is reduced, and the surface is flawed. Therefore, the relative humidity of the working environment should be strictly controlled between 40%-60%RH, which can be monitored and adjusted in real time by installing dehumidifiers, humidity sensors and other equipment to avoid damage to the granite base due to high humidity, and ensure the smooth operation of the ultra-precision motion module of the air float.
Third, cleanliness guarantee: the "guardian" of precision
The harm of dust particles to the precision granite base of the ultra-precision motion module of air flotation cannot be underestimated. Once the tiny particles enter the gas film gap between the gas float slider and the granite base, they may destroy the uniformity of the gas film, increase friction, and even scratch the surface of the base, resulting in reduced movement accuracy. In the ultra-precision machining workshop of aerospace parts, if the dust particles in the air fall on the granite base, the motion trajectory of the machining tool may be deviated, affecting the machining accuracy of the parts. Therefore, the work area should be kept highly clean, reaching 10,000 or even higher levels of cleanliness standards, through the installation of air purification equipment, such as high efficiency air filters (HEPA), filter out the dust particles in the air, at the same time, staff need to wear dust-free clothing, shoe covers, etc., to reduce the dust brought by humans. Maintain high precision operating environment of granite base and air float ultra-precision motion module.
Four, vibration isolation: smooth operation of the "shock pad"
The external vibration is the enemy of the precision of the ultra-precision motion module of the air float. Although the precision granite base has a certain vibration attenuation ability, the high-strength vibration may still break its buffer limit. The vibration generated by the traffic around the factory and the operation of large mechanical equipment is transmitted to the granite base through the ground, which will interfere with the motion accuracy of the ultra-precision motion module of the air float. In high-end CMM, vibration may cause the contact between the measuring probe and the workpiece to be measured to be unstable, resulting in deviation of the measurement data. In order to solve this problem, it is necessary to adopt effective vibration isolation measures, such as laying vibration isolation pads in the equipment installation area, building vibration isolation foundation, or using active vibration isolation system to actively offset external vibration, and create a quiet and stable working environment for the granite precision base and the air float ultra-precision motion module.
Only by fully meeting the environmental requirements of temperature, humidity, cleanliness and vibration control, the granite precision base of the ultra-precision motion module of the air float can give full play to its performance advantages, provide reliable guarantee for ultra-precision operations in various fields, and help the industry to move towards a higher precision manufacturing and scientific research level.
Post time: Apr-08-2025