n the world of semiconductor manufacturing, precise and accurate equipment is critical to produce high-quality chips. There are numerous parts of a semiconductor manufacturing facility that must use materials with specific properties to ensure reliable and high-precision operation.
One material that has become a standard component of semiconductor equipment is granite. Known for its strength and stability, granite is an excellent material for constructing and fabricating components used in semiconductor equipment. Here are some of the parts of semiconductor equipment that commonly use granite material:
1. Base plates
The base plates of semiconductor equipment need to be extremely flat and stable to minimize vibrations and variations in temperature. And granite is one of the few materials that can meet these requirements. Granite is a dimensionally stable material that resists warping and thermal expansion, ensuring that the base plate maintains its flatness over time.
2. Stages
Stages are critical components in semiconductor equipment that perform precise movements for manufacturing processes like wafer positioning, etching, and deposition. Granite stages are widely used in semiconductor equipment due to their high stiffness, low thermal expansion, and excellent damping properties. With granite stages, the movements are more precise, and the equipment has a lower risk of failure.
3. Linear guides
Linear guides are mechanical devices that provide linear motion along two parallel rails. They need to be extremely stable and precise, and granite is the ideal material for this purpose. The high-stiffness and damping properties of granite make it a popular choice for linear guides used in semiconductor equipment, ensuring stability, and precision in the manufacturing process.
4. Chucks
Chucks are used to hold and position wafers during various manufacturing processes. Granites chucks are popular because of their flatness and thermal stability. Because of granite's low thermal expansion, chucks made from this material do not warp or change dimensions when exposed to temperature changes.
5. Inspection plates
Inspection plates are used to check the quality of the products manufactured in semiconductor equipment. These plates need to be extremely flat and stable, and able to reflect light accurately. Granite's high reflectivity, surface flatness, and dimensional stability make it a popular choice for inspection plates in semiconductor equipment.
In conclusion, granite elements are widely used for precision parts in semiconductor equipment, and their use is projected to expand due to their excellent properties. With their high stiffness, low thermal expansion, and excellent damping properties, granite elements provide the required stability, accuracy, and repeatability for performing nano-scale operations in semiconductor equipment. Companies that produce high-quality semiconductor equipment invest in the best materials to give their products the best chance for success, and granite continues to be a go-to material due to its excellent properties and reliability.
Post time: Mar-19-2024