Granite materials are widely used in the semiconductor industry due to their excellent characteristics, such as high stability, low thermal expansion, and high resistance to corrosion. These properties make granite an ideal material for building high-precision components in a wafer transfer system.
In the semiconductor manufacturing process, the wafer transfer system plays a critical role in transporting wafers across different stages of the manufacturing process. Precision and accuracy are the essential requirements for these systems as even slight deviations could jeopardize the whole process. Therefore, components in the wafer transfer system must be made from high-quality materials, and granite meets those criteria.
Some parts of the wafer transfer system that are made from granite materials include:
1. Vacuum Chuck Table
The vacuum chuck table is used for holding the wafer during the process, and it must have a stable surface to ensure the wafer is not damaged. Granite is an ideal material for making this table because it has a flat, non-porous surface that provides high stability and precision. Additionally, granite has a low coefficient of thermal expansion, making it resistant to temperature changes that could cause dimensional changes in the wafer.
2. Air-Bearing Stage
The air-bearing stage is used to transport the wafer through different stages of the manufacturing process. The stage is engineered to provide a frictionless movement, which requires high precision and stability. Granite is used in this application because it is a rigid and hard stone, and it resists deformation and wear over time.
3. Linear Motion Guides
The linear motion guides are used to guide the air-bearing stage, and they must be accurately positioned to minimize errors. Granite is used to build this guide because it has excellent mechanical stability and strength. The material is also corrosion-resistant, which ensures the longevity of the guide system.
4. Metrology Equipment
Metrology equipment is used to measure the dimensions and properties of the wafer during the manufacturing process. Granite is an ideal material for building this equipment because it has high stiffness, low expansion, and minimal deformation under load. Moreover, granite's thermal stability ensures that the metrology equipment remains stable and accurate over time.
In conclusion, the semiconductor industry relies on precision and accuracy, and granite materials have proven to be highly reliable and stable in the manufacturing process. With many critical components in the wafer transfer system requiring high stability, precision, and low thermal expansion, engineers have turned to granite materials to meet these critical requirements.
Post time: Mar-19-2024