In the semiconductor industry, wafer inspection is a key link to ensure the quality and performance of the chip, and the accuracy and stability of the inspection table play a decisive role in the detection results. Granite base with its unique characteristics, become the ideal choice for semiconductor wafer inspection table, the following from the multi-dimensional analysis for you.
First, the precision guarantee dimension
1. Ultra-high flatness and straightness: The granite base is processed by advanced processing technology, and the flatness can reach ±0.001mm/m or even higher accuracy, and the straightness is also excellent. In the wafer inspection process, the high-precision plane provides stable support for the wafer and ensures accurate contact between the probe of the inspection equipment and the solder joints on the wafer surface.
2. Very low coefficient of thermal expansion: semiconductor manufacturing is sensitive to temperature changes, and the coefficient of thermal expansion of granite is extremely low, usually about 5×10⁻⁶/℃. When the detection platform is running, even if the ambient temperature fluctuates, the size of the granite base changes very little. For example, in the high-temperature workshop in summer, the temperature of the common metal base detection platform may cause the relative position of the wafer and the detection equipment to shift, affecting the detection accuracy; The granite base detection platform can maintain stability, ensure the relative position accuracy of wafer and detection equipment during the detection process, and provide a stable environment for high-precision detection.
Second, stability dimension
1. Stable structure and vibration resistance: Granite after millions of years of geological processes, the internal structure is dense and uniform. In the complex environment of a semiconductor factory, the vibration generated by the operation of peripheral equipment and personnel walking around is effectively attenuated by the granite base.
2. Long-term use accuracy: compared with other materials, granite has high hardness, strong wear resistance, and Mohs hardness can reach 6-7. The granite base surface is not easily worn during frequent wafer loading, unloading and inspection operations. According to the actual use of data statistics, the use of granite base testing table, continuous operation after 5000 hours, flatness and straightness accuracy can still be maintained at more than 98% of the initial accuracy, reducing the equipment due to wear of the base caused by regular calibration and maintenance times, reduce business operating costs, to ensure the long-term stability of testing work.
Third, clean and anti-interference dimension
1. Low dust generation: the semiconductor manufacturing environment needs to be highly clean, and the granite material itself is stable and not easy to produce dust particles. During the operation of the test platform, the dust generated by the base is avoided to pollute the wafer, and the risk of short circuit and open circuit caused by dust particles is reduced. In the wafer inspection area of the dust-free workshop, the dust concentration around the granite base inspection table is always controlled to an extremely low level, meeting the stringent cleanliness requirements of the semiconductor industry.
2. No magnetic interference: the detection equipment is sensitive to the electromagnetic environment, and granite is a non-magnetic material, which will not interfere with the electronic signal of the detection equipment. In the use of electron beam detection and other testing technologies that require extremely high electromagnetic environment, the granite base ensures the stable transmission of the electronic signal of the detection equipment and ensures the accuracy of the test results. For example, when the wafer is tested for high-precision electrical performance, the non-magnetic granite base avoids interference with the detection current and voltage signals, so that the detection data truly reflects the wafer electrical characteristics.
Post time: Mar-31-2025