Semiconductor manufacturing: In the chip manufacturing process, the photolithography process needs to transfer the circuit pattern precisely to the wafer. The granite base of the single axis air floating ultra-precision motion module can provide high precision positioning and stable support for the wafer table in the lithography equipment. For example, ASML and other internationally renowned lithography machine manufacturers use granite base air floating motion modules in their high-end equipment, which can control the positioning accuracy of the wafer at the nanometer level to ensure the accuracy of the lithography pattern, thereby improving the integration and performance of the chip.
Precision measurement field: CMM is a precision measurement equipment commonly used in industrial production, which is used to measure the size, shape and position accuracy of the workpiece. The ultra-precision motion module of the single axis air float on the granite base can be used as the motion platform of the CMM, which can realize high-precision linear motion and provide a stable motion trajectory for the measuring probe. For example, Hexagon's high-end CMM uses this combination to measure large and complex parts with measuring accuracy up to the micron level, providing a strong guarantee for parts quality control in the automotive, aerospace and other industries.
Aerospace field: In the processing and testing of aerospace parts, high precision is required. For example, the machining of aircraft engine blades requires precise control of the tool's motion trajectory to ensure the blade profile accuracy. The granite base of the single axis air float ultra-precision motion module can be applied to the five-axis machining center and other equipment to provide high-precision motion control for the tool and ensure that the machining accuracy of the blade can meet the design requirements. At the same time, in the assembly process of the aero engine, it is also necessary to use high-precision measuring equipment to detect the assembly accuracy of the parts. The air floating motion module of the granite base can provide stable support and accurate movement for the measuring equipment to ensure the assembly quality.
Optical inspection field: In the manufacturing and testing process of optical components, it is necessary to perform high-precision positioning and measurement of optical components. For example, when manufacturing high-precision optical components such as mirrors and lenses, it is necessary to use interferometers and other equipment to detect the surface shape accuracy. The granite base of the single axis air floating ultra-precision motion module can be used as the movement platform of the interferometer, which can realize the sub-micron positioning accuracy and provide accurate data support for the detection of optical components. In addition, in the laser processing equipment, it is also necessary to use a high-precision motion platform to control the scanning trajectory of the laser beam, the granite base of the air floating motion module can meet this requirement, to achieve high-precision laser processing.
Post time: Apr-07-2025