In the fields of high-end manufacturing and cutting-edge scientific research, precision static pressure air floating movement platform is the key equipment to achieve ultra-precision operation. The granite precision base is the core supporting part of the platform, and its performance is closely related to the working environment. Understanding and meeting these environmental requirements can not only ensure the high-precision operation of the platform, but also an important part of the enterprise to enhance its competitiveness in related fields, which is described in detail below.
1. Temperature: precise control to ensure dimensional stability
Although granite is known for its stability, its coefficient of thermal expansion is not zero, and small temperature changes may still affect its dimensional accuracy. Generally speaking, the thermal expansion coefficient of granite is 5-7 ×10⁻⁶/℃. In the application scenario of precision static pressure air floating movement platform, this slight change is amplified by the platform, which may lead to the deviation of movement accuracy. For example, in the semiconductor chip manufacturing process, the lithography process for positioning accuracy requirements of danami level, the ambient temperature fluctuation of 1 ° C, the side length of 1 meter granite base may produce 5-7 microns of linear expansion or contraction, which is enough to make the chip lithography pattern deviation, reduce the yield. Therefore, the precision static pressure air floating platform equipped with granite precision base, the ideal working environment temperature should be strictly controlled at 20 ° C ±1 ° C, enterprises can install high-precision constant temperature air conditioning system, continuously monitor and accurately adjust the ambient temperature, maintain the size of the granite base stability, to ensure that the platform high-precision operation.
2.humidity: reasonable control, protect the base performance
Humidity also has a significant effect on precision granite bases. In a high humidity environment, granite is easy to absorb water vapor, and there may be condensation on the surface, which will not only interfere with the normal operation of the air flotation system, but also lead to long-term erosion of the granite surface, reducing its accuracy and service life. Taking the optical lens grinding workshop as an example, if the humidity is higher than 60%RH for a long time, the water vapor adsorbed on the surface of the granite base will destroy the uniformity of the air float film, resulting in a decrease in the lens grinding accuracy and surface defects. Therefore, the relative humidity of the working environment needs to be controlled between 40%-60%RH. Enterprises can use dehumidifiers, humidity sensors and other equipment to monitor and control the humidity in real time, create a suitable humidity environment for the precision granite base, and ensure the stable operation of the precision static pressure air floating movement platform.
3. cleanliness: strictly control, eliminate particle interference
Dust particles are the "enemy" of precision static pressure air floating movement platform, and do great harm to granite precision base. Once the tiny particles enter the gas film gap between the gas float slider and the granite base, they may destroy the uniformity of the gas film, increase friction, and even scratch the surface of the base, seriously affecting the accuracy of the platform movement. In the ultra-precision machining workshop of aerospace parts, if the dust particles in the air fall on the granite base, the motion trajectory of the machining tool may be deviated, affecting the machining accuracy of the parts. Therefore, the working area should be kept highly clean and reach a cleanliness standard of 10,000 or even higher. Enterprises can filter out dust particles in the air by installing high efficiency air filters (HEPA), and require staff to wear dust-free clothing, shoe covers, etc., to reduce the dust brought by humans, and maintain the high-precision operating environment of granite base and precision static pressure air floating movement platform.
4. Vibration: Effective isolation to create a smooth space
External vibration will seriously interfere with the precision of the precision static pressure air floating platform, although the precision granite base has a certain vibration attenuation capacity, but the high strength vibration may still break its buffer limit. The vibration generated by the traffic around the factory and the operation of large mechanical equipment is transmitted to the granite base through the ground, which will interfere with the accuracy of the platform movement. In high-end CMM, vibration may cause the contact between the measuring probe and the workpiece to be measured to be unstable, resulting in deviation of the measurement data. In order to solve this problem, it is necessary to adopt effective vibration isolation measures, such as laying vibration isolation pads in the equipment installation area, building vibration isolation foundation, or using active vibration isolation system to actively offset external vibration, and create a quiet and stable working environment for the granite precision base and precision static pressure air floating movement platform.
Meet the above environmental requirements, in order to give full play to the advantages of granite precision base in the precision static pressure air floating movement platform, to ensure that the platform provides high-precision and high-stability motion control services for various industries. If enterprises can pay attention to these details in the production environment, they will seize the opportunity in precision manufacturing, scientific research and other fields, enhance their competitiveness, and achieve sustainable development.
Post time: Apr-10-2025