Semiconductor manufacturing
Lithography: Lithography is a key process in semiconductor manufacturing that requires the precise transfer of complex circuit patterns onto wafers. The XYT precision active vibration isolation motion platform on the granite base can provide stable support and accurate positioning for the lithography equipment, ensure that the position accuracy of the wafer table in the exposure process reaches the nanometer level, effectively reduce the pattern deviation caused by vibration and thermal deformation, and improve the manufacturing accuracy and yield of the chip.
Wafer inspection: After the wafer manufacturing is completed, it needs to be inspected with high precision to find small defects and defects. XYT precision active vibration isolation motion platform can carry detection equipment, such as electron beam microscope, atomic force microscope, etc., to maintain stable movement and accurate positioning during the detection process, so that the detection equipment can accurately scan the wafer surface, improve the detection resolution and accuracy.
Optical instrument manufacturing
Lens grinding and polishing: In the manufacturing process of optical lenses, it is necessary to grind and polish the lenses with high precision to obtain good optical properties. XYT precision active vibration isolation movement platform can precisely control the movement path of grinding and polishing tools, while the granite base can isolate external vibration, reduce the impact of vibration on machining accuracy, to ensure that the surface of the lens flatness and finish meet the design requirements.
Optical system assembly: In the assembly process of the optical system, various optical components need to be precisely installed in a specific position to ensure the accurate propagation of light and imaging quality. XYT precision active vibration isolation motion platform with granite base can provide a stable platform for the installation and adjustment of optical components, and achieve high-precision alignment and assembly of optical components through precise motion control.
aerospace
Inertial navigation system test: Inertial navigation system is an important navigation equipment in the aerospace field, and its accuracy directly affects the navigation accuracy and flight safety of aircraft. In the process of testing inertial navigation system, it is necessary to use high-precision turntable to simulate various motion states of the aircraft. XYT precision active vibration isolation motion platform can be used as a support platform for the rotary table. Through precise motion control and good vibration isolation performance, it provides a stable and accurate moving environment for the inertial navigation system test, and improves the test accuracy and reliability.
Aero engine blade machining: The machining accuracy of aero engine blade has an important impact on the performance and efficiency of the engine. XYT precision active vibration isolation movement platform can be applied to the machining process of the blade, such as the five-axis linkage machining center, by precisely controlling the movement path of the tool and maintaining a stable processing environment, to achieve high-precision machining of the blade, to ensure that the blade profile accuracy and surface quality meet the design requirements.
Scientific research testing
Nanoscience research: In nanoscience research, it is necessary to operate and observe nano-scale objects, such as the preparation of nanomaterials and the assembly of nanodevices. The granite base of XYT precision active vibration isolation motion platform can provide sub-micron or even nano-level positioning accuracy, provide a stable and accurate experimental platform for nanoscientific research, and help scientists better explore the mysteries of the nano world.
Biomedical imaging: In the biomedical field, such as fluorescence microscopy, confocal microscopy and other imaging devices, in order to obtain high-resolution biological images, precise positioning and stable imaging of the sample are required. XYT precision active vibration isolation motion platform can carry biological samples, reduce the vibration and drift of samples through accurate motion control and good vibration isolation performance, improve the quality and accuracy of imaging, and help biomedical researchers to conduct in-depth research on cell, tissue and other microscopic structures.
Post time: Apr-11-2025