What is the thermal stability of granite base in semiconductor equipment?

Granite is a type of rock known for its hardness, durability, and resistance to chemical corrosion. As such, it has become a popular choice for the base of semiconductor equipment. The thermal stability of the granite base is one of its most attractive features.

Thermal stability refers to the ability of a material to resist changes in its structure when exposed to high temperatures. In the context of semiconductor equipment, it is essential that the base has high thermal stability since the equipment operates at high temperatures for extended periods. Granite has been found to have excellent thermal stability, with a low coefficient of thermal expansion (CTE).

The CTE of a material refers to the amount that its dimensions change when exposed to changes in temperature. A low CTE means that the material is less likely to warp or deform when exposed to different temperatures. This is particularly important for the base of semiconductor equipment, which needs to remain stable and flat to ensure accurate and reliable results.

Compared to other materials commonly used for semiconductor equipment bases, such as aluminum and stainless steel, granite has a much lower CTE. This means that it can withstand higher temperatures without warping or deforming. Additionally, granite's thermal conductivity allows it to dissipate heat quickly, which can help maintain a stable temperature during operation.

Another advantage of using granite as a base for semiconductor equipment is its resistance to chemical corrosion. The equipment used in semiconductor manufacturing often involves the use of harsh chemicals, which can corrode and damage the base. Granite's resistance to chemical corrosion means that it can withstand exposure to these chemicals without deteriorating.

In conclusion, the thermal stability of granite is an essential feature for the base of semiconductor equipment. Its low CTE, high thermal conductivity, and resistance to chemical corrosion make it an ideal material for this purpose. By using granite as a base, semiconductor manufacturers can ensure the stability and accuracy of their equipment, resulting in high-quality products and increased efficiency.